A novel OPC method to reduce mask volume with yield-aware dissection
Conventional OPC flow and lithography process, where OPC is very time... | Download Scientific Diagram
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HSF applied to OPC mask. HSF region (blue) shows complete ILT solution... | Download Scientific Diagram
IBM and Synopsys Demonstrate EUV OPC Workload Runs >11,000 Cores on the Hybrid Cloud | IBM
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How to make lithography patterns print: the role of OPC and pattern layout | Semantic Scholar
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Curvilinear OPC improves silicon photonics layout
LAB enables OPC - GenISys GmbH
Figure 10 from Subwavelength Lithography ( PSM , OPC ) Tsuneo Terasawa | Semantic Scholar
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Increasing OPC complexity and mask costs | Download Scientific Diagram
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nanoHUB.org - Resources: ECE 695Q Lecture 10: Optical Lithography – Resolution Enhancement Techniques: Watch Presentation
Optical proximity correction - Wikipedia
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IDF 2004 Russia: 65nm Process Technology – Nearest Future of Intel Semiconductor Technologies
Optical proximity correction - Wikipedia
Smart Manufacturing and Metrology Lab. - Optical proximity correction technique for enhancing the resolution of Intel's optical lithographic process
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